nổ hũ pg˵ֽҪֽֽĹ漰ֲǸߺˮߺܵIJҵҪũҩʵʹҪԴռӡȾͨյijɱֻʹȴûһҪϴļʮռõĿռѶȶС2015.052016.04йʡί鳤оҸΣֹ2012.092015.11йѧѧרҵѧϰѧʿѧλ֪ʲô˴İ취ÿôɵʮһʦҲôɵҸɽʯһڿһҿһſDZɽط˼ǧϱľӺͺܶɱвһһñϵڶšӢ۹ٱǷŵȥ֦سһεȼ
ý17ձǰоȫоƬ豸̡ASML̨ȽEUVߣֵ̻1.2ԪĿǰҵѴɹʶʹEUV̻ʹ뵼оƬ7nm5nmʱϢ̨൱оȥȫ豸2019ǰ߷֤ݵɹ涨۵֤һ֤Ϻ֤֤
27ձʱ顰ΪƳϵʰ뵺־ù̵ĺƽƼл쵼ҲͬʱǰһֱڴٽԼԱԤߵֵ2%ʵ2015꿪ʼͽԤռ2%
˲ڲΡע201411ձġŻιءнŻǷ⽨ϵͽĻIJһЩȴִ˲ƣǰȨ˽ѡվԶı˲ıĥϵȡЩ˱ϺܷͷӲؼʱ̿סɲ˶ͻݺҵƣפʦԶеıҪͨϾʩԱжṩߴ15-20Ԫĸ߶֧